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Lollypop Microwave UV Lamps

Replacement Electrode-less LOLLY POP MICROWAVE UV LAMP - designed for use in various systems made by the OEM Axcelis/Fusion.

Examples include the M200 H-MOD system for Photoresist Cure, OEM lamp part number 203669 - LAMP UV MOD H and FUSION M150PC.

We can also provide matching replacements for other OEM lamp part numbers, including 068221, 068224 MODIFIED "D", 068229 LAMP H-MOD, and 054544. Please get in touch if you need help or assistance.

Ordering Information:

Part Number:

054544
068221
068224
068229
203661
203669
UVPS-LOLLYPOP

Description:

LOLLYPOP AEL BULB
LOLLYPOP AEL BULB
LOLLYPOP AEL BULB-D
LOLLYPOP AEL BULB-M
LOLLYPOP AEL BULB
LOLLYPOP AEL BULB-M
UVLAMP:LOLLYPOP LAMP

Datasheet: